瑞昌明盛自动化设备有限公司

产品标题：GENESIS GHW55A-13DF4L0-001射频发生器

产品型号：GHW55A-13DF4L0-001

品牌：GENESIS

质保：七天验收期,质保期一年

交货期： 1-3个工作

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产品详情资料

Product Details

GENESIS GHW55A-13DF4L0-001 RF Generator
1. MKS-ENI Genesis series semiconductor 5500W RF power supply, 13.56MHz process frequency
2. Closed loop power regulation, highly stable output power under plasma load fluctuations
3. Supports continuous wave and pulse modulation output, compatible with etching and PVD coating processes
4. Built in high-speed standing wave detection, rapid power reduction protection for excessive reflected power
5. Multiple hardware protection mechanisms for overheating, overvoltage, overcurrent, and arc
6. High RF conversion efficiency, low overall heat generation, and reduced cabinet heat dissipation pressure
7. Analog digital communication interface, compatible with semiconductor equipment upper computer control system
8. Real time read back of key process parameters such as forward power and reflected power
9. Fault code recording and storage facilitate quick on-site identification of abnormal issues
10. External automatic impedance matching device, suitable for variable plasma loads
11. Rack standard installation dimensions, compatible with semiconductor equipment cabinet layout
12. Complete electromagnetic shielding to reduce RF interference to the surrounding boards of the cavity
13. Process parameters can be stored and called to ensure the repeatability of batch processes
14. Support 7 × 24-hour uninterrupted mass production operation
15. Modular power unit, faulty components can be disassembled and maintained separately

Summary: GENESIS GHW55A-13DF4L0-001 is a high-power 13.56MHz RF generator with stable power and comprehensive protection, used for power supply in semiconductor etching and thin film deposition plasma processes.

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